Improvement in the Ground Surface Roughness of Fused Silica X-ray Mirror with ELID-Grinding

摘要

Troidal fused silica X-ray mirrors measuring 300 mm long used for powerful X-ray sources like synchrotron radiation were ground using a large ultra-precision aspherical ELID grinding system. In order to reduce the finishing time, methods to improve the ground surface roughness by ELID grinding were investigated. The results show that optimization of grinding conditions such as adoption of micro depth of grinding, use of the #4000 grinding wheel, and selection of an appropriate wheel feed direction realizes a surface roughness of Ra8.7nm.