Terahertz imaging with micro-bridge structure detector array and 2.52THz far infrared laser

摘要

A room temperature operating terahertz (THz) detector with low thermal conductive micro-bridge structure is presented using metal thin film as THz wave absorber. Vanadium oxide is acted as thermal sensitive material and |TCR| of the film is ~2%/K. The detector array is fabricated on silicon substrate with read-out integrate circuit. THz wave transmission imaging could be obtained with the micro-bridge focal plane array and 2.52THz far infrared CO_2 pumped laser.