Fabrication and parameters calculation of room temperature terahertz detector with micro-bridge structure

摘要

Room temperature terahertz (THz) detector indicates great potentials in imaging application because of real-time, compact bulk and unique spectral characteristics. Different dimension THz detectors based on micro-bridge structure were designed and simulated to get optimizing microbolometer parameters from the simulation results of membrane temperature changing and THz absorption. Those microbolometers were fabricated with complex semiconductor process and three dimension deformations of micro-bridges were obtained by laser scanning confocal microscope to identify the focal plane array micro-bridge design. The noise equivalent power of THz detector achieves 123 pW/Hz(1/2) and average response time of the detector is 6.7 ms, which is suitable for the application of active THz imaging.