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Evaluation of a Neon Focused Field Ion Source: Fabrication and Characteristics

机译:评估霓虹聚焦的野外离子源:制造和特征

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A new type of gaseous field ion source (GFIS) was developed. The GFIS has several advantages that includes small energy spread (~1eV), a virtual source size of ~2nm and can be operated with inert gases such as neon, argon or helium among a wide range of gases. Research to overcome the problem of their relatively low angular current densities that hinders the use of such source in technological applications, was carried out in order to confine the ion current to a small area on the emitter surface. Small protrusions were formed by the field evaporation of a multiphase alloy that contains ultrafine (1-5nm in diameter) spherical precipitates [1]. Such type of metallurgical system is called precipitation-hardened alloy. Following field evaporation, the precipitate will protrude from the surface producing a brightly-imaging region in the field ion image. This is due to the precipitate having a higher evaporation field than the surrounding base material. The source material used was the equiatomic Ni-Al (B{sub}2-ordered) alloy doped with small amounts of W and C. The composition of the alloy and its heat treatment produced high number density of ultrafine brightly-imaging WC or W{sub}2C precipitates and low solubility of W and C in the matrix phase. Those have good mechanical strength to withstand the high stress associated with the application of high electric field.
机译:开发了一种新型的气田离子源(GFI)。 GFI具有若干优点,包括小能量扩散(〜1EV),虚拟源尺寸为约2nm,并且可以用惰性气体,例如氖,氩气或氦气之间的各种气体。为了克服其相对低的角度电流密度的问题,妨碍了在技术应用中使用这种源的使用,以将离子电流限制在发射极表面上的小区域。小突起由含有超细多相合金(1-5nm直径)球形沉淀物[1]的场蒸发而形成。这种类型的冶金系统称为沉淀硬化合金。在场蒸发之后,沉淀物将从在现场离子图像中产生亮相成像区域的表面突出。这是由于沉淀物具有比周围的基材更高的蒸发场。所用的源材料是等原子镍 - 铝(B {子} -2-订购)合金掺杂有少量W和C的合金的组成和它的热处理所产生的色泽成像WC或W超细的高数量密度{Sub} 2C在基质相中沉淀和低溶解度。这些具有良好的机械强度,以承受与高电场的应用相关的高应力。

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