Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners

摘要

This paper presents modeling, fabrication and characterization of two designs of two-axis gimbal-less, thin-film PZT driven micromirrors with 1mm² apertures. These micromirrors reach high frequencies for piston (21 kHz) and torsional modes (28.9 kHz) and the θopt· D product achieves up to 20.7°·mm driven by a unipolar rectangular pulse of 10 V. The combination of high frequency operation and the high driving force of the piezoelectric actuators leads to a very short reaction time. Furthermore, by combining the two adjacent torsion modes of the micromirrors circle laser beam trajectories can be realized.