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机译:基于氮化铝Aluminum的压电微机械超声换能器的设计,制造和表征
Department of Mechanical and Aerospace Engineering, University of California at Davis, Davis, CA, USA;
Department of Mechanical and Aerospace Engineering, University of California at Davis, Davis, CA, USA;
Advanced Modular Systems, Inc., Goleta, CA, USA;
Advanced Modular Systems, Inc., Goleta, CA, USA;
Department of Mechanical and Aerospace Engineering, University of California at Davis, Davis, CA, USA;
Aluminum nitride; III-V semiconductor materials; Electrodes; Silicon; Scandium; Etching; Resonant frequency;
机译:双稳定铝基压电微机械超声换能器(PMUT)
机译:基于腔体SOI晶片的压电微机械超声换能器阵列的建模,制造和表征
机译:智能外延压电微加工超声换能器的制备与表征
机译:36%掺Scan氮化铝压电微机械超声传感器
机译:压电微机械超声换能器阵列的建模,制造和表征。
机译:基于图案化氮化铝薄膜的高密度压电微加工超声换能器阵列的研制
机译:压电微机械超声换能器Si的PZT纤维外延薄膜的制备与表征