36 Scandium-Doped Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers

摘要

Piezoelectric micromachined ultrasonic transducers (PMUTs)using 36% Scandium-doped aluminum nitride (ScAIN)thin-film are presented in this work. ScAIN is known to exhibit higher piezoelectric properties compared to pure AIN leading to significant improvements in various MEMS applications including PMUTs. Here, the concentration of Sc in the actual sputtered 1 um thick ScA1N film was 36% that is slightly below the phase boundary. The piezoelectric coefficient is close to maximum at this high concentration leading to significant improvement in the PMUT performance. The ScA1N film quality was verified via X-Ray Diffraction (XRD), electron probe microanalysis (EPMA), and d33 meter. The operation frequency was designed to around 80 kHz to achieve long range detection, where the air absorption loss is low. The displacement sensitivity of 1 mm diameter ScA1N PMUT was 806 nm/V at 84 kHz resonant frequency. A large displacement of 4.8 um was achieved at 20 V pp input at the fixed frequency of 84 kHz. This represents a factor of 9 increase in transmit amplitude compared to prior art air-coupled A1N PMUTs.