CMOS- COMPATIBLE, HIGH-YIELD SIMPLIFIED FABRICATION METHOD OF MICROSCANNERS AND APPLICATIONS OF SAID MICROSCANNERS

摘要

The present invention relates to systems and methods for fabricating microscanners . The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.