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The study on grinding process of flip chip wafers

机译:倒装晶片的研磨工艺研究

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IC technology changes with each passing day, developing towards the direction of higher integration, higher density and smaller size. The process of wire bonding can't meet the requirements. FC(Flip chip) technology becomes more mature day by day. Bump interconnection is an important characteristic of flip chip, usually consisting of PbSn alloy or SnAgCu alloy. In order to ensure the effective interconnection between bumps and substrates, the bumps need keep coplanar. However, certain pressure will act on wafers during the process of grinding and taping. The question of how to protect bumps from deformation and How to reduce the damage layer after grinding will be studied Dicing is the process after grinding. Taping is also used before dicing. The technological process will be introduced.
机译:IC技术日新月异,朝着更高集成度,更高密度和更小尺寸的方向发展。引线键合工艺不能满足要求。 FC(倒装芯片)技术日趋成熟。凸点互连是倒装芯片的重要特征,通常由PbSn合金或SnAgCu合金组成。为了确保凸块和基板之间的有效互连,凸块需要保持共面。但是,在研磨和包胶过程中,一定的压力会作用在晶片上。将研究如何保护凸块不变形以及如何减少磨削后的损伤层的问题。切块是磨削后的过程。在切块之前也使用编带。将介绍技术过程。

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