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Moisture diffusion and integrated stress analysis in encapsulated microelectronics devices

机译:封装微电子器件中的湿气扩散和集成应力分析

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In this paper, a damage mechanics-based continuum theory is developed to provide a theoretical framework for multi-field problems involving moisture diffusion, heat conduction, moisture evaporation, void growth, and material deformation in a temperature and time-dependent process in encapsulated microelectronics devices. The analysis of moisture diffusion using normalized moisture concentration is re-examined under various conditions, and the applicability of the thermal-moisture analogy is discussed. Effective stress concept is introduced to consider the effect of vapor pressure in the development of a continuum mechanics framework. It turns out that the volumetric strains consist of three parts: thermal expansion (or contraction), hygroscopic swelling, and vapor pressure-induced volumetric strains. Void volume fraction is introduced as a field variable to describe the damage progression. The evolution of void volume fraction is governed by the continuity equation. Vapor pressure is considered as another internal field variable, which is related to moisture evaporation. A complete set of multi-field governing equations are developed. A simplified process, which allows the coupled problem to be solved sequentially, is defined. A bi-material assembly is used to illustrate the multi-field solutions using ANSYS.
机译:在本文中,开发了一种基于损伤的基于机械的连续统称理论,为涉及水分扩散,导热,水分蒸发,空隙生长和封装的微电子中的温度和时间依赖过程中的材料变形提供了一种理论框架。设备。在各种条件下重新检查使用归一化水分浓度的水分扩散的分析,并讨论了热水分类比的适用性。引入有效的应力概念,以考虑蒸气压在连续式力学框架开发中的影响。事实证明,体积菌株由三个部分组成:热膨胀(或收缩),吸湿肿胀和蒸汽压力诱导的体积菌株。空隙体积分数被引入为域变量来描述损坏进展。空隙量分数的演变由连续性方程管辖。蒸气压被认为是另一种内部场变量,与水分蒸发有关。开发了一套完整的多场管理方程式。定义了允许顺序解决耦合问题的简化过程。双材料组件用于说明使用ANSYS的多场解决方案。

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