Temperature, flow and pressure are critical parameters that influence the performance of fuel cells, in terms of potential, current and power density, for example. Hence, the monitoring of non-uniform temperature/flow rate/pressure within a proton exchange membrane fuel cell (PEMFC) is crucial. To prevent degradation of the performance of a PEMFC, the size of sensors is reduced herein to a µm scale using micro-electro-mechanical systems (MEMS). Integrated flexible micro sensors were fabricated and embedded in a PEMFC to measure local pressure, temperature, and flow rate. The temperatures upstream and downstream of the PEMFC were respectively 64.8°C and 64.7°C at RH50% and 0.1 A/cm2, and 62.7°C and 64.3°C at RH100% and 0.1 A/cm2.
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