Sensor component has micro-electro mechanical system (MEMS) component that is integrated with pressure sensor, temperature sensor, humidity sensor and evaluation circuit

摘要

The sensor component (100) has a housing (17) having a MEMS component (10). The MEMS component is integrated with a pressure sensor (11), a temperature sensor (12), a humidity sensor (13) and an evaluation circuit (14). The housing is provided with a media access opening (28) for the pressure sensor. The humidity sensor is realized in the form of a capacitor assembly having a polymer dielectric.