A freestanding microchannel, with integrated temperature sensors, has been developed for high-pressure flow studies. These microchannels are approximately 20μm x 2μm x 4400μm, and are suspended above 80 μm deep cavities, bulk micromachined using BrF3 dry etch. The calibration of the lightly boron-doped thermistor-type sensors shows that the resistance sensitivity of these integrated sensors is parabolic with respect to temperature and linear with respect to pressure. Volumetric flow rates of N2 in the microchannel were measured at inlet pressures up to 578 psig. The discrepancy between the data and theory results from the flow acceleration in a channel, the non-parabolic velocity profile, and the bulging of the channel. Bulging effects were evaluated by using incompressible water flow measurements, which also measures 1.045x10^-3N-s/m^2 for the viscosity of DI water. The temperature data from sensors on the channel shows the heating of the channel due to the friction generated by the high-pressure flow inside.
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机译：已开发出具有集成温度传感器的独立式微通道，用于高压流动研究。这些微通道大约为20μmx2μmx4400μm，并悬浮在80μm深的腔上方，使用BrF3干法蚀刻进行批量微加工。轻度掺硼热敏电阻类型传感器的校准表明，这些集成传感器的电阻灵敏度相对于温度呈抛物线型，而相对于压力呈线性。在高达578 psig的入口压力下测量了微通道中N2的体积流量。数据和理论之间的差异是由通道中的流速，非抛物线速度分布和通道的膨胀引起的。通过使用不可压缩的水流量测量来评估膨胀效果，该流量的去离子水粘度也为1.045x10 ^ -3N-s / m ^ 2。来自通道上传感器的温度数据显示由于内部高压流产生的摩擦而导致通道加热。
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