Design and Analysis of In-Plane Ultra-Precision XYθ_z Positioning Stage with Cymbal Guide and Scott-Russell Mechanism

摘要

This paper presents the design, finite element analysis, and experimental results of a new ultra-precision XYθ_z positioning stage with serial kinematics between parts for translational motion and rotational motion. The stage is actuated by three commercial stack type PZT actuators. Two translational motions are guided by four cymbal mechanisms. The cymbal mechanisms of proposed XYθ_z stage have functions of not only motion guide but also motion amplifier. And, the leaf spring guides a rotational motion which is amplified by the Scott-Russell mechanism. Finite element analysis was carried out in order to predict the XYθ_z stage performance, which will be validated by experimental results. The size of a prototype XYθ_z stage is 240 × 240 × 25 mm~3. The 1st resonance frequencies of the translational motion part and the rotational motion part were 145Hz and 125Hz. The translational motion travel range is 50 × 50 μm and the rotational motion range is 1 mrad.