Molybdenum bilayer thin film on large area by cylindrical rotating DC magnetron sputtering for CIGS solar cell application

摘要

Highly conductive and adhesive Molybdenum (Mo) thin film back contact on soda lime glass (SLG) substrate popularly deposited by magnetron sputtering is essential for fabrication of Cu (In,Ga) (Se,S) 2, Cu (Zn,Sn) (S,Se) 2, CdTe and Sb_2Se_3 based thin film solar cells. Electrical and optical properties of the sputtered Mo thin films are predominantly governed by sputtering process conditions such as sputter power, deposition pressure and substrate temperature. In this work, we investigated influence of deposition pressure on phase constitution, adhesion strength on SLG, electrical and optical properties of bilayer Mo thin films coated on 300 mm × 300 mm × 3 mm Soda lime glass substrate using cylindrical rotating DC magnetron sputtering. The prepared bilayer Mo thin films using optimized sputter process conditions was further used as back contact for Cu (In,Ga) Se2 solar cell device, demonstrated a photo-conversion efficiency of 5.0% on an area of 0.16 cm~2 under 100 mW/cm~2 illuminations.