Characterization of a 61 element bulk-PZT thick-film deformable mirror and generation of Zernike polynomials

摘要

This paper describes the characteristics of a 61 element piezoelectric deformable mirror (DM) based on bulk-PZT thick film and the generation of Zernike polynomials. This device consists of a continue silicon mirror supported by 61 element piezoelectric unimorph actuators which are arranged in a hexagonal grid with spacing of 5mm. Measurements of the displacement using a laser Doppler vibrometer demonstrated that the stroke of DM was 3.8μm at 100 volt with a displacement hysteresis of approximately 9% and the operating bandwidth was greater than 10KHz. A custom phasing-shifting interferometer based on Twyman-Green interferometer was developed to measure the mirror surface shape in response to the applied voltage. The influence function of the mirror measured accorded with Gaussian function with inter-actuator coupling of approximately 5%, which was similar to the traditional piezoelectric DM with stacked actuators. To examine the ability of the mirror to replicate optical aberrations described by the Zernike polynomials, low-order Zernike modes were reproduced by calculating the voltage on each actuator using an influence function matrix. The measurement demonstrated that the deformable mirror could produce the Zernike modes up to the ninth term. Considering the low-voltage actuation as well as the capability for miniaturization of the actuator size, deformable mirror actuated by bulk-PZT thick film has a potential application for low-cost adaptive optics.