Observation of three-level random telegraph noise in GIDL current of Saddle-Fin type DRAM cell transistor

摘要

Multi level RTNs have been measured in GIDL current of DRAM cell transistor. Three-level RTN which has not been reported in GIDL current was observed. We found that this RTN has unique characteristics which could be distinguished from two-level RTN by single trap and four-level RTN due to two traps. Also, we discussed bias dependency of time constants of the three-level RTN.