This paper presents a bistable microfluidic valve with a thermopneumatic actuator that is thermoelectrically driven. A functional prototype is fabricated in silicon technology. The majority of the fabrication process, including the integration of the micro-Peltier devices, is performed at wafer level. The tested valves are switched with ÃÂñ10 V pulses with an energy input of approximately 1 J for closing and 2 J for opening the valve. Leak rates below 1 ÃÂÿl/min are measured for inlet pressures up to 100 kPa.
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机译：本文介绍了一种双稳态微流体阀，该阀具有热电驱动的热电驱动器。功能原型是用硅技术制造的。包括微珀尔帖器件的集成在内的大多数制造过程都是在晶圆级执行的。被测阀用ƒ±10 V脉冲进行切换，其能量输入约为1 J用于关闭，2 J用于打开阀。对于高达100 kPa的入口压力，测得的泄漏率低于1Âl l / min。
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