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Interface degradation of Al heavy wire bonds on power semiconductors during active power cycling measured by the shear test

机译:通过剪切测试测量在有功功率循环期间功率半导体上的Al重金属丝键合的界面退化

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Wire bonding is still the dominant interconnection technology for power semiconductors in power modules, e.g. for automotive or photovoltaic applications. In the past, many research activities have occurred in the field of reliability of power modules, where the life time of the complete module is affected by bond wire lift offs, heel cracks and other failures. Less effort was spent for investigating the degradation process at the wire bond itself. This paper addresses a new approach and focuses on the investigation of the cracks in the interface region between the die and the wire by using the shear test. These cracks form after several thousand temperature swings due to CTE mismatch and ultimately lead to wire bond lift off. New results of active power cycling with different temperature amplitudes and medium temperatures will be discussed. Shear tests have been carried out in regular intervals to monitor the degradation of the 400 μm wire bonds on power MOS-FETs. It was found out that the rate of the shear force reduction was mostly dependent on the amplitude of the temperature cycling. A significant effect of different medium temperatures could not be identified. These results will contribute to the development of an enhanced life time model for heavy wire bonds on power semiconductors.
机译:引线键合仍然是功率模块(例如,功率模块)中的功率半导体的主要互连技术。用于汽车或光伏应用。过去,功率模块的可靠性领域发生了许多研究活动,其中整个模块的使用寿命受键合线提离,脚跟裂纹和其他故障的影响。花费更少的精力来研究引线键合处的降解过程。本文提出了一种新方法,并着重于通过剪切试验研究模具与线材之间的界面区域中的裂纹。这些裂缝是由于CTE不匹配而在几千个温度波动之后形成的,并最终导致引线键合剥离。将讨论具有不同温度幅度和中等温度的有功功率循环的新结果。定期进行了剪切测试,以监控功率MOS-FET上400μm引线键合的退化。发现剪切力降低的速率主要取决于温度循环的幅度。无法确定不同介质温度的显着影响。这些结果将有助于开发功率半导体上重金属丝键合寿命更长的模型。

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