首页> 外文会议>Electronics Packaging Technology Conference, 2009. EPTC '09 >Electrodeposition of Sn-Ag-Cu solder alloy for electronics interconnection
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Electrodeposition of Sn-Ag-Cu solder alloy for electronics interconnection

机译:电子互连的Sn-Ag-Cu焊料合金的电沉积

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A pyrophosphate and iodide based bath was investigated for the electrodeposition of near-eutectic Sn-Ag-Cu alloy, which is one of the promising lead-free solder candidates for electronics interconnection. The bath contained pyrophosphate and iodide as chelating agents. The composition of electrodeposits were measured by wavelength dispersive X-ray spectroscopy (WDS). Different morphologies of deposited films were analysed using scanning electron microscopy (SEM). X-ray diffraction (XRD) data indicated that Sn, Ag3Sn and Cu6Sn5 were present in the ¿as-electroplated¿ film. The proposed bath was capable of fine pitch near-eutectic Sn-Ag-Cu solder bumps as demonstrated on a glass test wafer.
机译:研究了一种以焦磷酸盐和碘化物为基础的镀液,用于近共熔Sn-Ag-Cu合金的电沉积,这是用于电子互连的有希望的无铅焊料之一。该浴液含有焦磷酸盐和碘化物作为螯合剂。电沉积物的组成通过波长色散X射线光谱法(WDS)测量。使用扫描电子显微镜(SEM)分析了沉积膜的不同形态。 X射线衍射(XRD)数据表明,锡,银 3 Sn和铜 6 Sn 5 存在于电镀膜。拟议的镀液能够在玻璃测试晶圆上显示出细间距的近共晶Sn-Ag-Cu焊料凸点。

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