We have built a system for measurement of pallet position in pallet-chuck clamping systems for automatic manufacturing industry. By employing a fibre-optic interferometer for absolute distance measurements the position of the pallet can be detected with accuracy better than 0.2 μm. Hence, this will make automatized ultra-precision production (<0.5 μm) possible.The system consists of a broad-band light source, the chuck incorporated with optical fibres, and a spectrometer. The distance is extracted from the detected spectrogram by mathematical analysis. Repeated measurements on a clamped pallet gives results within a few nm.
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