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EFFECTS OF PLASMA PRETREATMENT ON FLIP CHIP AND CSP SUBSTRATE LEVEL ASSEMBLY YIELD AND RELIABILITY

机译:等离子体预处理对倒装芯片和CSP基质水平组件产量和可靠性的影响

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A comprehensive study is performed investigating the influence of plasma pretreatment on assembly yield for solder flip chip in package assemblies and chip scale package (CSP) assembly to SIP modules. In addition, a detailed reliability screening is performed on the assemblies to assess the impact of pre assembly plasma treatment on long term reliability of the assemblies. Various plasma treatment techniques and two substrate surface finishes are included in the experimental analysis. The flip chip and CSP devices are underfilled with fast flow, snap cure underfill material. Baseline assemblies without plasma pretreatment are tested for comparison. The test vehicles are subjected to liquid to liquid thermal shock or air to air thermal cycle testing and analyzed using electrical test, CSAM, X-ray, and microsectioning. Visual inspection of the plasma treated samples revealed higher more uniform fillet shapes especially in the corners of the components compared with the untreated devices. CSAM analysis indicated no significant difference between the plasma treated and non-plasma treated samples in terms of underfill uniformity and void formation during processing. The flow times for the plasma treated flip chip samples were 12 to 20 percent faster than the non-plasma treated samples. The flow times for the plasma treated CSPs were 55% faster than the flow times for the untreated samples. As for flip chip reliability differences, the plasma treated test vehicles with Au finish had the highest reliability with a 70 improvement over untreated samples. In contrast, the untreated flip chip assemblies with an OSP finish had 78% higher reliability compared with the plasma treated counterpoints. For the CSP components, the reliability of the components were generally the same as the non-Plasma treated samples.
机译:进行了一项全面的研究,研究了等离子体预处理对封装倒装中的焊料倒装芯片和芯片级封装(SSP)的芯片级封装(CSP)组装的成品率的影响。此外,对组件进行了详细的可靠性筛选,以评估预组装等离子体处理对组件的长期可靠性的影响。实验分析中包括各种等离子体处理技术和两种基材表面光洁度。倒装芯片和CSP器件填充有快速流动,快速固化的底部填充材料。对未经等离子体预处理的基线组件进行了测试以进行比较。对测试车辆进行液体到液体的热冲击或空气到空气的热循环测试,并使用电气测试,CSAM,X射线和显微切片进行分析。与未经处理的设备相比,对经过等离子体处理的样品进行目视检查发现,圆角形状更高,尤其是在组件的角部。 CSAM分析表明,在处理过程中,底部填充均匀性和空隙形成方面,等离子体处理和非等离子体处理的样品之间无显着差异。经等离子体处理的倒装芯片样品的流动时间比未经等离子体处理的样品快12%至20%。经等离子体处理的CSP的流动时间比未经处理的样品的流动时间快55%。至于倒装芯片的可靠性差异,经过金处理的等离子处理测试车辆具有最高的可靠性,比未经处理的样品提高了70倍。相反,与等离子处理的对位点相比,未经处理的OSP倒装芯片组件的可靠性高78%。对于CSP组件,组件的可靠性通常与未经等离子处理的样品相同。

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