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The integration of RF passives using thin-film technology on high-ohmic Si in combination with thick-film interconnect

机译:在高欧姆Si上使用薄膜技术与厚膜互连相集成的RF无源

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A technology platform is presented for the integration of passive components in RF circuits. The platform consists of a thin film process on high-ohmic Si combined with thick film technology. The thin film process is used for sections in RF circuit where a relatively high degree of component accuracy is needed, e.g. for impedance matching. The thin film process uses ρ>4 kΩ .cm Si substrates on which IC compatible layers, such as sputtered Al and CVD silicon nitride and oxide, are deposited and structured. This process is capable of fabricating inductors and capacitors with a performance that does not differ significantly from inductors and capacitors processed on an insulating substrate, such as glass and alumina. Inductors with a Q-factor between 40 to 60 and capacitors with an ESR < 200 mΩ in the 1-2 GHz frequency range are realized. Using the thin film process in combination with thick film interconnect a 2 Ω to 50 Ω impedance matching circuit is realized with an insertion loss of 0. 8 dB at 900 MHz.
机译:提出了一个用于将无源组件集成到RF电路中的技术平台。该平台由结合高电阻Si的薄膜工艺和厚膜技术组成。薄膜工艺用于RF电路中需要较高程度的组件精度的部分,例如:用于阻抗匹配。薄膜工艺使用ρ> 4kΩ.cm的Si基板,并在其上沉积和结构化IC兼容层,例如溅射的Al和CVD氮化硅和氧化物。该工艺能够制造具有与在诸如玻璃和氧化铝的绝缘基板上处理的电感器和电容器没有明显不同的性能的电感器和电容器。在1-2 GHz频率范围内,实现了Q系数在40至60之间的电感器和ESR <200mΩ的电容器。通过将薄膜工艺与厚膜互连结合使用,可实现2Ω至50Ω阻抗匹配电路,在900 MHz时的插入损耗为0. 8 dB。

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