Thermal design and batch fabrication of cantilever probes for scanning thermal microscopy

摘要

Scanning thermal microscopy (SThM) has enabled direct observation of thermal phenomena at the nanometer scale. The superior spatial resolution makes SThM attractive for thermally probing electronic and optoelectronic devices as well as nanostructures. In the past, lack of thermal design of SThM probes led to inaccuracy and artifacts in the thermal images.