Measurement and correlation of ion beam current density to moisture stability of oxide film stacks fabricated by cold cathode ion assisted deposition

摘要

Durable and dense dielectric optical stacks, deposited with the assist of a gridded, Kaufman-type ion source have been extensively reported upon. A primary limitation of this technique is a significant reduction of ion source lifetime when high levels of oxygen are required to achieve specific film properties. COld cathode ion sources, which are capable of continuous operation with 100