Improved conductivity measurement of semiconductor epitaxial layers by means of the contactless microwave method

机译：通过非接触微波方法改进的半导体外延层电导率测量

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Abstract: Measurements and calculations of the scattering-characteristics of stratified lossy dielectric blocks completely filling a waveguide cross section are presented. The method is used for contactless conductivity measurements of MBE-grown II-VI semiconductor layers.!3

机译：摘要：介绍了完全填充波导截面的分层有损耗介质块的散射特性的测量和计算。该方法用于MBE生长的II-VI半导体层的非接触电导率测量！3

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《International conference on millimeter and submillimeter waves and applications》|1994年|p.649-658|共10页
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P.Boege; Univ. Wuerzburg; Wuerzburg; Federal Republic of Germany; H.Schaefer; Univ. Wuerzburg; Wuerzburg; Federal Republic of Germany; Shanjia Xu; Univ. of Science; Technology; Hefei; Anhui; China; Xinzhang Wu; Univ. of Science; Technology; Hefei; Anhui; China; S.Einfeldt; Univ. Wuerzburg; Wuerzburg; Federal Republic of Germany; C.R. Becker; Univ. Wuerzburg; Wuerzburg; Federal Republic of Germany; D.Hommel; Univ. Wuerzburg; Wuerzburg; Federal Republic of Germany; Reinhart Geick; Univ. Wuerzburg; Wuerzburg; Federal Republic of Germany.;
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中图分类无线电电子学、电信技术;
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1. Contactless methods of conductivity and sheet resistance measurement for semiconductors, conductors and superconductors [J] . Jerzy Krupka Measurement Science & Technology . 2013,第6期

机译：半导体，导体和超导体的非接触式电导率和薄层电阻测量方法
2. Comparison Of The 3ω Method And Time-domain Thermoreflectance For Measurements Of The Cross-plane Thermal Conductivity Of Epitaxial Semiconductors [J] . Yee Kan Koh, Suzanne L. Singer, Woochul Kim, Journal of Applied Physics . 2009,第5期

机译：外延半导体横向平面热导率测量中3ω方法和时域热反射率的比较
3. Contactless electrical defect characterization in semiconductors by microwave detected photo induced current transient spectroscopy (MD-PICTS) and microwave detected photoconductivity (MDP) [J] . Bastian Berger, Nadine Schiiler, Sabrina Anger, Physica status solidi . 2011,第4期

机译：微波检测的光感应电流瞬态光谱法（MD-PICTS）和微波检测的光导率（MDP）表征半导体中的非接触电缺陷
4. Improved conductivity measurement of semiconductor epitaxial layers by means of the contactless microwave method [C] . Author(s): P.Boege Univ. Wuerzburg Wuerzburg Federal Republic of Germany, H.Schaefer Univ. Wuerzburg Wuerzburg Federal Republic of Germany, Shanjia Xu, International conference on millimeter and submillimeter waves and applications . 1994

机译：通过非接触式微波法改进半导体外延层的电导率测量
5. A wideband two-layer microwave measurement method for the electrical characterization of thin materials. [D] . Williams, Trevor Cameron. 2002

机译：一种宽带两层微波测量方法，用于薄材料的电表征。
6. Direct comparison of time-resolved Terahertz spectroscopy and Hall Van der Pauw methods for measurement of carrier conductivity and mobility in bulk semiconductors [O] . Brian G. Alberding, W. Robert Thurber, Edwin J. Heilweil -1

机译：时间分辨太赫兹光谱法和Hall Van der Pauw方法的直接比较用于测量体半导体中的载流子电导率和迁移率
7. Improved conductivity-measurement of semiconductor epitaxial layers by means of the contactless microwave method [O] . Boege P., Schäfer H., Shanjia Xu, 2009

机译：通过非接触微波法改进半导体外延层的电导率测量
8. Contactless Microwave Measurements of Photoconductivity in Silicon Hyperdoped with Chalcogens. [R] . Recht, D., Hutchinson, D., Cruson, T., 2012

机译：用硫属元素掺杂超硅的光电导率的非接触式微波测量。

Improved conductivity measurement of semiconductor epitaxial layers by means of the contactless microwave method

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