Comparative study of the laser damage threshold and optical characteristics of Ta_2O_5 - SiO_2 multilayers deposited using various methods

摘要

Manufacturing processes from the private and academic sectors were used to deposit anti-reflective and high-reflective coatings composed of Ta_2O_5 - SiO_2 multilayers. Used deposition techniques included three Ion Assisted Deposition (IAD) systems and an Ion Beam Sputtering (IBS) system. Coatings were performed on fused silica (Corning 7980) substrates polished by two different suppliers. LIDT Measurements were performed using a Q-Switched Nd:YAG laser operating at 1064nm. The paper presents a comparison of the coatings in terms of laser damage threshold values, optical properties and surface quality.