Electron images from thin silicon films

摘要

Amorphous and microcrystalline silicon films prepared by plasma enhanced chemical vapour deposition have been investigated by high resolution transmission electron microscopy. Optical diffractograms have been obtained from electron micrographs from areas of both amorphous and microcrystalline films. Electron micrographs were also processed digitally by applying an assortment of low-pass filters. No evidence of nanocrystallinity was obtained from the amorphous silicon films.