Design and simulation of RF MEMS cantilever and bridge switches for high switching speed and low voltage operation and their comparison

摘要

In this paper we present the design and simulations of RF MEMS cantilever and bridge switches with regard to their switching speed and pull-down voltage. The switches are required to fulfil the requirements of high speed and a moderate pull down voltage for the switching of capacitive micromachined ultrasonic transducer (CMUT) elements used for ultrasound imaging. The switch type can be either capacitive contact or DC contact, depending on the operating frequency requirement.