Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

摘要

In this paper, fully integrated radio frequency (RF) microelectromechanical system (MEMS) switches with piezoelectric actuation have been proposed, designed, fabricated, and characterized. At a very low operation voltage of 2.5V, reliable and reproducible operation of the fabricated switch was obtained. The proposed RF MEMS switch is comprised of a piezoelectric cantilever actuator with a floated contact electrode and isolated CPW transmission line suspended above the silicon substrate. The measured insertion loss and isolation of the fabricated piezoelectric switch are -0.22 dB and -42dB at a frequency of 2GHz, respectively.