A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm/spl times/7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 k/spl Omega/. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.
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机译：提出了一种用于驱动静电致动器的远程感应供电系统。通过使发射器频率与接收器LC电路的谐振频率匹配，可以有选择地控制执行器。 8.5 mm / spl次/7.2 mm平方和20匝平面线圈用作接收器线圈。当负载电阻大于100 k / spl Omega /时，接收器的最大输出电压约为45V。常规的静电梳状致动器用于远程供电系统的原型。线圈和致动器被制造在可购得的绝缘体上硅（SOI）晶片的同一表面上。通过改变变送器的频率有选择地控制执行器的位移。
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