CMOS image sensors-recent advances and device scaling considerations

摘要

This paper reviews the industry trend and the recent advances in CMOS image sensor technology, covering advances in technology, devices, pixel architecture, as well as on-chip circuit integration. Compatibility with "standard" CMOS technology is an important consideration for CMOS image sensors. We therefore explore the question: "will the image sensing performance of CMOS imagers get better or get worse as CMOS technologies are scaled?" We project that "standard" CMOS technologies cannot be used for imaging in the deep sub-micron regime without some process modifications.