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Microwave Contactless Method to Measure the Nonequilibrium Carriers'' Effective Lifetime in Si Wafers

机译：微波非接触法测量硅晶片中非平衡载流子的有效寿命

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摘要

A method of contactless measurement of non-equilibrium carriers'' (NEC) effective lifetime in Si wafers has been developed; it allows forming a map of NEC effective lifetime surface distribution

机译：已经开发出一种非接触式测量硅晶片中非平衡载流子（NEC）的有效寿命的方法。它可以形成NEC有效寿命表面分布图

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《》|2006年|780-781|共2页
会议地点
作者
I. A. Karpovich; A. V. Adakimchik; E. I. Kozlova; V. B. Odzhaev; O. N. Yankovsky;
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carrier lifetime; microwave measurement; NEC effective lifetime surface distribution; Si; Si wafers; microwave contactless method; nonequilibrium carriers measurment;

机译：载流子寿命;微波测量; NEC有效寿命表面分布;硅;硅片;微波非接触法;非平衡载流子测量;

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1. A contactless method for measuring the lifetimes of nonequilibrium charge carriers in semiconductors [J] . N. B. Radchuk, A. Yu. Ushakov Instruments and Experimental Techniques . 2003,第3期

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2. Measurement of nonequilibrium carrier recombination lifetime in silicon wafers by noncontact microwave technique [J] . P. A. Borodovskii, A. F. Buldygin, A. S. Tokarev Optoelectronics, Instrumentation and Data Processing . 2000,第6期

机译：非接触微波技术测量硅晶片中非平衡载流子复合寿命
3. A microwave method for determination of the recombination rate of nonequilibrium charge carriers in the bulk and at the surface of doped silicon wafers [J] . O. G. Koshelev Industrial Laboratory: Diagnostics of Materials . 2000,第10期

机译：微波法测定掺杂硅片整体和表面非平衡电荷载流子的复合率
4. Microwave Contactless Method to Measure the Nonequilibrium Carriers'' Effective Lifetime in Si Wafers [C] . I. A. Karpovich, A. V. Adakimchik, E. I. Kozlova, Microwave and Telecommunication Technology, 2006 16th International Crimean . 2006

机译：微波非接触法测量硅晶片中非平衡载流子的有效寿命
5. Microwave Instrumentation and Sensing Techniques for Quantum Efficiency and Minority-Carrier Lifetime Measurements [D] . Lu, Kyle Benjamin. 2017

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7. Excess Carrier Lifetimes in a Bulk p-type SiC Wafer Measured by the Microwave Photoconductivity Decay Method [O] . Masahiko Kawai, Tatsuhiro Mori, Masashi Kato, 2015

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8. Method and apparatus for measuring minority carrier lifetimes and bulk diffusion length in P-N junction solar cells [R] . 1978

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Microwave Contactless Method to Measure the Nonequilibrium Carriers'' Effective Lifetime in Si Wafers

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