Method of measuring the effective lifetime of excessive minority carriers and effective lifetime measuring apparatus of excess minority carriers

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for measuring an effective lifetime of excess minority carriers, capable of measuring the effective lifetime of the excess minority carriers with ease and high accuracy.SOLUTION: Disclosed is a method for measuring an effective lifetime of excess minority carriers which includes: a first step of changing intensity of light irradiated to a semiconductor to measure photoconductivity; a second step of specifying a non-trapping region which is a region where influence due to trapping of excessive minority carriers can be ignored using a relationship between the light intensity and the photoconductivity; and a third step of obtaining the effective lifetime of the excessive minority carriers using a value of the photoconductivity in the non-trapping region.SELECTED DRAWING: Figure 1