Method for measuring effective lifetime of excess minority carrier and apparatus for measuring effective lifetime of excess minority carrier

摘要

PROBLEM TO BE SOLVED: To provide an effective lifetime measurement method for an excess minority carrier capable of highly accurately calculating the effective lifetime of the excess minority carrier, and an effective lifetime measurement device for the excess minority carrier.SOLUTION: An effective lifetime measurement method for an excess minority carrier includes: a first step of measuring photoconductivity σof a semiconductor while changing an irradiation light intensity Iof a light with which the semiconductor is irradiated, and obtaining multiple plot points indicating a relationship between the irradiation light intensity σand the photoconductivity σof the semiconductor; a second step of calculating an approximate straight line for each of multiple aggregates 1 consisting of continuous multiple plot points, calculating photoconductivity σin a case where the irradiation light intensity Iis 0 in the multiple approximate straight lines, and defining a maximum value of the photoconductivity as photoconductivity σcaused by trapping of the excess minority carrier; and a third step of using the photoconductivity σcaused by the trapping to calculate an effective lifetime τ of the excess minority carrier.SELECTED DRAWING: Figure 1