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Determining capacity loss from operational and technical deployment practices in a semiconductor manufacturing line

机译:确定半导体生产线中运营和技术部署实践的能力损失

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This paper describes a data analysis system that accurately measures the amount of capacity lost from both operational and technical deployment issues. Deployment is defined as instances where WIP is queued in front of a busy tool when another tool, which can run this product, has some idle-no-WIP time. In this case, the idle-no-WIP must be treated as capacity loss because the opportunity to run WIP on the tool with idle time has been lost. This tool combines equipment state data, lot logistic data, and tool restriction data to determine the magnitude of this loss. As a result, meaningful statistics can be obtained about differences in team work methods, the amount of staffing on the floor the consequences of non-optimized tool layout, and the effects of technical restrictions.
机译:本文介绍了一种数据分析系统,该系统可以准确地衡量由于运营和技术部署问题而损失的容量。部署的定义是,当可以运行此产品的另一个工具有一些WIP闲置时间时,WIP在繁忙的工具前排队。在这种情况下,必须将无WIP视为容量损失,因为已经失去了在有空闲时间的情况下在工具上运行WIP的机会。该工具结合了设备状态数据,大量物流数据和工具限制数据,以确定这种损失的严重程度。结果,可以获得有关团队工作方法差异,现场人员数量,未优化工具布局的后果以及技术限制的影响的有意义的统计数据。

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