Studies on dependence of wet oxidation kinetics of AlAs layer in vertical-cavity surface-emitting laser structures on different physical parameters

摘要

The dependence of the wet oxidation rate of AlAs on different experimental parameters as well as the thickness of the AlAs layer has been studied. A theory to explain the dependence of oxidation rate on different physical parameters for both diffusion-limited and reaction-limited situations has been presented, based on a diffusion-reaction process for selective oxidation of AlAs layer. For a given experimental condition, this theory can effectively predict the oxidation rate of an AlAs layer of any given thickness.