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Observation of Coulomb blockade in structures created by the method of SECO (step edge cut off)

机译:观察通过SECO方法创建的结构中的库仑阻塞(台阶边缘被切除)

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For observation of the Coulomb blockade, SECO-structures with self-aligned gates with island size of 170/spl times/170/spl times/12 nm on Ti/Si/sub 3/N/sub 4/ were fabricated. On these structures, single-electron current oscillations from gate voltage were observed at a temperature of 4.2 K. The magnitude of the Coulomb gap was 6 mV.
机译:为了观察库仑封锁,在Ti / Si / sub 3 / N / sub 4 /上制作了岛尺寸为170 / spl次/ 170 / spl次/ 12 nm的具有自对准门的SECO结构。在这些结构上,在4.2 K的温度下观察到来自栅极电压的单电子电流振荡。库仑间隙的大小为6 mV。

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