Monolithic micro-electromechanical system (MEMS) technology allows one to fabricate and integrate MEM structures (micro-actuators and microsensors) with driving, controlling, and signal processing circuitry needed to attain data analysis, and control. This monolithic improves the performance of MEMS, reduces the cost and packaging, increases efficiency and reliability. The application of MEMS attains the major breakthrough in actuators, motion devices and servo-systems. The current trends in development and deployment of MEMS have facilitated the unified activities in the fabrication and analysis of smart structures and materials, design of micro-circuitry and controllers. In this paper, we solve the motion control problem for MEMS by using nonlinear dynamics of MEM structures (smart materials) and driving circuitry. Analytical, numerical and experimental results are presented.
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