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Challenges To 0.1 /spl mu/m Resolution Capability In ArF Single Layer Resist Process With Weak Resolution Enhancement Techniques

机译：弱分辨率增强技术在ArF单层抗蚀工艺中对0.1 / spl mu / m分辨率的能力提出了挑战

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《》|1998年|P.261-262|共2页
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Takahashi; M.; Kishimura; S.;
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中图分类无线电电子学、电信技术;
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专利

1. High-resolution superconducting X-ray spectrometers with an active area of 282 /spl mu/m/spl times/282 /spl mu/m [J] . Mears C.A., Labov S.E. IEEE Transactions on Applied Superconductivity . 1997,第2期

机译：高分辨率超导X射线光谱仪的有效面积为282 / spl mu / m / spl次/ 282 / spl mu / m
2. Self-assembled organic monolayers as high-resolution resists in rapid nonlinear processing with single femtosecond laser pulses [J] . Mareike Mathieu, Steffen Franzka, Juergen Koch, Applied Physics . 2010,第3期

机译：自组装有机单分子层可在单飞秒激光脉冲的快速非线性处理中作为高分辨率抗蚀剂
3. Self-assembled organic monolayers as high-resolution resists in rapid nonlinear processing with single femtosecond laser pulses [J] . Mareike Mathieu, Steffen Franzka, Jürgen Koch, Applied Physics A: Materials Science & Processing . 2010,第3期

机译：自组装有机单分子层可在单飞秒激光脉冲的快速非线性处理中作为高分辨率抗蚀剂
4. Challenges To 0.1 /spl mu/m Resolution Capability In ArF Single Layer Resist Process With Weak Resolution Enhancement Techniques [C] . Takahashi M., Kishimura S., Institute of Electric and Electronic Engineer International Microprocesses and Nanotechnology Conference . 1998

机译：具有弱分辨率增强技术的ARF单层抗蚀剂0.1 / SPL MU / M分辨率的挑战
5. High resolution signal processing techniques for enhancing GPS receiver performance [D] . Tamazin, Mohamed. 2015

机译：高分辨率信号处理技术可增强GPS接收机的性能
6. Enhancement of Sensitivity and Resolution of Surface-Enhanced Laser Desorption/Ionization Time-of-Flight Mass Spectrometric Records for Serum Peptides Using Time-Series Analysis Techniques [O] . Dariya I. Malyarenko, William E. Cooke, Bao-Ling Adam, -1

机译：使用时间序列分析技术提高血清肽的表面增强激光解吸/电离飞行时间质谱记录的灵敏度和分辨率
7. How to achieve sub-cellular-level spatial resolution and sub-spike-level temporal resolution at same time is still a technical challenge in neural mapping while both information are critically important to advance neural science. Here, we present penetrating arrays consisted of single-neuron level transparent microelectrodes with low impedance coating which could realize the high spatial and temporal resolution at the same time. These 32-channel transparent penetrating electrodes with record-small site area, 225 µm², have a low impedance of ~ 149 kΩ at 1 kHz, an adequate charge injection limit of ± 0.76 mC/cm2, and up to 100 yield. Mechanical bending test result show robust mechanism up to 1000 bending cycles. After a temporary stiffen with polyethylene glycol, this electrode achieved great insertion result without any buckling or deformation. Together these results establish a novel neurotechnology - penetrating arrays of transparent, flexible bilayernanomeshMicroelectrodes which possess great potential for brain research [O] . Zhan Shi -1

机译：如何在同一时间实现子蜂窝级空间分辨率和子峰值级时间分辨率在神经映射中仍然是技术挑战，而两个信息对于推进神经科学来说都很重要。这里，我们提出穿透阵列由单神经元级透明微电极组成，具有低阻抗涂层，其可以同时实现高空间和时间分辨率。这些32通道透明穿透电极具有记录小的部位面积，225μm²的低阻抗在1 kHz的〜149kΩ的低阻抗，充足的电荷注入极限为±0.76mc / cm2，率高达100％。机械弯曲试验结果显示高达1000个弯曲循环的强大机制。在用聚乙二醇进行临时变硬后，该电极实现了很大的插入结果，而无需任何屈曲或变形。这些结果共同建立了一种新型神经技术 - 穿透透明，灵活的双层圆形脉冲阵列，其具有巨大的大脑研究潜力

Challenges To 0.1 /spl mu/m Resolution Capability In ArF Single Layer Resist Process With Weak Resolution Enhancement Techniques

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