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Characterization of a planar RF induction plasma source for polymer film deposition processes

机译：用于聚合物膜沉积工艺的平面RF感应等离子体源的特性

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《》|1992年|P.177-177|共1页
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Mahoney; L.J.; Shohet; J.L.;
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中图分类无线电电子学、电信技术;
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Characterization of a planar RF induction plasma source for polymer film deposition processes

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