It is shown that significant H/sub 2/ pumping occurs in the walls of triode pumps. Also, H/sub 2/ is pumped in the anode cells of sputter-ion pumps. This pumping occurs in a manner similar to that by which the inert gases are pumped. That is, H/sub 2/ is pumped in the walls of the anode cells by high-energy neutral burial. Hydrogen in the pump walls and anodes limits the base pressure of the pump.
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机译：结果表明，在三极管泵的壁中发生了显着的H / sub 2 /抽运。同样，H / sub 2 /被泵送到溅射离子泵的阳极池中。该泵送以类似于惰性气体泵送的方式进行。即，H / sub 2 /通过高能中性埋入被泵入阳极单元的壁中。泵壁和阳极中的氢气限制了泵的基本压力。
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