It is shown that significant H/sub 2/ pumping occurs in the walls of triode pumps. Also, H/sub 2/ is pumped in the anode cells of sputter-ion pumps. This pumping occurs in a manner similar to that by which the inert gases are pumped. That is, H/sub 2/ is pumped in the walls of the anode cells by high-energy neutral burial. Hydrogen in the pump walls and anodes limits the base pressure of the pump.
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机译：结果表明，在三极管泵的壁中发生显着的H / SUB 2 /泵送。 此外，H / SUB 2 /被泵入溅射离子泵的阳极电池中。 这种泵送以类似于泵送惰性气体的方式发生。 也就是说，H / SUB 2 /通过高能量中性埋藏泵入阳极电池的壁中。 泵壁和阳极中的氢气限制了泵的基础压力。
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