Pumping mechanisms in sputter-ion pumps low pressure operation.

摘要

It is shown that significant H(sub 2) pumping occurs in the walls of triode pumps. Also, H(sub 2) is pumped in the anode cells of sputter-ion pumps. This pumping occurs in a manner similar to that by which the inert gases are pumped. That is, H(sub 2) pum ...