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Mesa structure formation using potassium hydroxide and ethylene diamine based etchants

机译：使用氢氧化钾和乙二胺基蚀刻剂形成台面结构

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A comparative study was done between ethylene diamine-pyrocatechol (EDP) and potassium hydroxide (KOH) etching systems for micromachining mesas in

机译：乙二胺-邻苯二酚（EDP）和氢氧化钾（KOH）蚀刻系统之间进行微加工台面的比较研究

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《》|1988年|P.102-103|共2页
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Chang; S.-C.; Hicks; D.B.;
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中图分类无线电电子学、电信技术;
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4. Mesa structure formation using potassium hydroxide and ethylene diamine based etchants [C] . Chang S.-C., Hicks D.B., Institute of Electric and Electronic Engineer IEEE Solid-State Sensor and Actuator Workshop . 1988

机译：使用氢氧化钾和乙烯二胺的蚀刻剂形成MESA结构形成
5. Collisions and reactions of n-propanol with molten sodium hydroxide/potassium hydroxide. [D] . Castro, David J. 2005

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8. Volumetric properties of vapor saturated aqueous potassium hydroxide solutions from 0/sup 0/ to 400/sup 0/ and vapor saturated aqueous sodium hydroxide solutions from 0/sup 0/ to 350/sup 0/ based on a regression of the available literature data [R] . 1977

机译：蒸汽饱和氢氧化钾水溶液的体积性质从0 / sup 0 /至400 / sup 0 /和蒸汽饱和氢氧化钠水溶液0 / sup 0 /至350 / sup 0 /基于现有文献数据的回归

Mesa structure formation using potassium hydroxide and ethylene diamine based etchants

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