Precision Motion Control of a Three Degrees of Freedom Hybrid Stage With Dual Actuators

机译：双执行器三自由度混合级的精密运动控制

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This paper presents a three degrees of freedom precision hybrid stage that can move and align an object on it for measurement of its three-dimensional image using the confocal scanning microscope. The hybrid stage consists of two individually operating x-

机译：本文介绍了一种三自由度精密混合平台，该平台可以移动并对准其上的物体，以使用共焦扫描显微镜测量其三维图像。混合阶段由两个独立运行的x-

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《Mechatronics and Automation, 2007 International Conference on》|2007年|P.1458-1465|共8页
会议地点 HarbinChina
作者
Yonmook Park; Hyuk Kim;
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actuators; image processing; linear motors; machine control; motion control; precision engineering; 3D image; confocal scanning microscope; dual actuators; linear motors; precision motion control; voice coil motors; Hybrid precision positioning stage; dual actuators;

机译：执行器；图像处理;直线电机；机器控制；运动控制;精密工程； 3D图像；共聚焦扫描显微镜双执行器；直线电机；精密运动控制；音圈马达；混合精密定位台；双执行器;

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4. Precision Motion Control of a Three Degrees of Freedom Hybrid Stage With Dual Actuators [C] . Park, Yonmook, Kim, . 2007

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Precision Motion Control of a Three Degrees of Freedom Hybrid Stage With Dual Actuators

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