A Novel range of noble metal organometallic fluorides for use in the fabrication of submicron metal features by E-beam or UV lrradiation

摘要

The preparation and characterisation of a novel organoplatinum fluoride is described. The physical vapour deposition (PVD) of the material was performed in the temperature rande 160-170 deg C , and electron beam bombardment or uv irradiation, results in the degradation of the compound to give high quality metal features down to dimensions of ca 60 nm.