首页> 外文会议>International Conference on Thin Film Physics and Applications; 20070925-28; Shanghai(CN) >Characterization of (001)-orientated polycrystalline α-HgI_2 films grown by hot wall physical vapor deposition
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Characterization of (001)-orientated polycrystalline α-HgI_2 films grown by hot wall physical vapor deposition

机译:通过热壁物理气相沉积生长的(001)取向多晶α-HgI_2薄膜的表征

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摘要

The highly (001)-orientated α-HgI_2 film was deposited by hot wall physical vapor deposition (HWPVD) technology. The scanning electron microscopy (SEM), X-ray diffraction (XRD), dark current versus applied voltage and capacitance-frequency characteristics analysis showed that the film was compactly formed by separated columnar monocrystallines with uniform orientation along c-direction and with high resistivity (2.5×10~(12)Ω·cm) and low dark current.
机译:通过热壁物理气相沉积(HWPVD)技术沉积高度(001)取向的α-HgI_2膜。扫描电子显微镜(SEM),X射线衍射(XRD),暗电流与施加电压和电容频率特性分析表明,膜是由分离的柱状单晶致密地形成的,这些柱状单晶沿c方向均匀且电阻率高( 2.5×10〜(12)Ω·cm),低暗电流

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