Design and Simulation of On-chip RF Magnetic Medium Inductors

摘要

On-chip RF magnetic medium inductor is one of the most promising solutions for the lacking of miniature high-quality inductors in RF IC. However, few theoretical and experimental results on magnetic inductors have been reported. In this paper, integrated mag-medium inductors are designed; high-resistivity magnetic material is used to achieve the mag-medium-fully-filled structure and closed magnetic circuit. Influences of structure and material parameters on inductor performance are firstly simulated and analyzed. Results give plentiful design instructions for the real achievement of small-size and high-performance on-chip magnetic inductors.