System-level Dynamic Simulation for A MEMS Clamped-Beam Based on the Mechanical Description

摘要

A method for developing the equivalent lumped electrical circuit based on the mechanical description of MEMS structures is proposed, which is used to carry out the system-level simulation of the dynamic behavior of the electromechanically coupled clamped-beam. The main idea of the method is to take the maximum displacement for the common variable, develop the equivalent mechanical description with the help of the mechanical analysis in combination with the energy principle, and implement the coupling process by feedback mechanism of the controlled sources. The equivalent electrical circuit can be used to simulate the transient response and frequency-shifting characteristic of the beam under electrostatic loads. Simulation from Saber in CoventorWare has confirmed the validity of the method.